Title of article :
The approach to diamond growth on levitating seed particles
Author/Authors :
Satoshi Shimizu، نويسنده , , Tetsuji Shimizu، نويسنده , , Beatrice M. Annaratone، نويسنده , , Wolfgang Jacob، نويسنده , , Christian Linsmeier، نويسنده , , Stefan Lindig، نويسنده , , Robert W. Stark، نويسنده , , Ferdinand Jamitzky، نويسنده , , Hubertus Thomas، نويسنده , , Noriyoshi Sato، نويسنده , , Gregor E. Morfill، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Pages :
4
From page :
177
To page :
180
Abstract :
We demonstrate the approach of diamond growth on levitating seed particles in a rf plasma. We introduce a hot filament chemical vapor deposition (CVD) technique into the rf plasma chamber in order to obtain improved crystal growth. Firstly, we confirmed diamond nucleation on seed particles placed on a Si substrate using the hot filament CVD. The deposition conditions, namely the total pressure and the rf power, were chosen so that they correspond to particles levitation conditions. We observe that a hydrogen pre-treatment on the seed particles improves the nucleation. Secondly, we confirm the levitation of particles at high temperatures. Fine particles levitated in a plasma are particularly sensitive to thermophoretic effects due to inhomogeneities in the gas heating. Therefore, proper heating procedures are required for successful particles levitation.
Keywords :
Levitation , Diamond , CVD , Hot filament , Particle
Journal title :
Applied Surface Science
Serial Year :
2007
Journal title :
Applied Surface Science
Record number :
1008472
Link To Document :
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