Title of article
Structural study of nanoporous ultra low-k dielectrics using complementary techniques: Ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering
Author/Authors
V. Jousseaume، نويسنده , , G. Rolland، نويسنده , , D. Babonneau، نويسنده , , J.-P. Simon، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2007
Pages
7
From page
473
To page
479
Abstract
Pages 473-479
Keywords
Porous ultra low k dielectrics , Materials for microelectronics , Structural determination , GISAXS , XRR , Ellipsometric porosimetry
Journal title
Applied Surface Science
Serial Year
2007
Journal title
Applied Surface Science
Record number
1008535
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