Title of article :
Structural study of nanoporous ultra low-k dielectrics using complementary techniques: Ellipsometric porosimetry, X-ray reflectivity and grazing incidence small-angle X-ray scattering
Author/Authors :
V. Jousseaume، نويسنده , , G. Rolland، نويسنده , , D. Babonneau، نويسنده , , J.-P. Simon، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Keywords :
Porous ultra low k dielectrics , Materials for microelectronics , Structural determination , GISAXS , XRR , Ellipsometric porosimetry
Journal title :
Applied Surface Science
Journal title :
Applied Surface Science
