Fabrication of uniform porous alumina materials by radio frequency (RF) magnetron sputtering

Fabrication of porous materials with uniform pore size distribution remains a challenge. In this paper, a kind of uniform porous alumina material was fabricated on a template of polystyrene microspheres by radio frequency (RF) magnetron sputtering. Surface of samples was observed by scanning electron microscopy (SEM), and the phase of porous materials was confirmed by X-ray diffraction (XRD). The pore size distribution of samples was tested by mercury intrusion method.