• Title of article

    Current topics of silicon germanium devices

  • Author/Authors

    Erich Kasper، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2008
  • Pages
    4
  • From page
    6158
  • To page
    6161
  • Abstract
    Silicon germanium (SiGe) is lattice mismatched to silicon by up to 4% depending on its Ge content. Basic investigations on strained layer growth, interface properties and deviation from equilibrium are done with SiGe/Si heterostructures. Early results are discussed in context with our recent understanding. The main focus of this overview is devoted to the micro- and optoelectronic devices which could be fabricated after solving or understanding the basic interface problems. This includes devices already in production, and those in emerging fields for inclusion in the next generation of integrated circuits, and a selection of device concepts with high merits to be proven in experiment.
  • Keywords
    Optoelectronics , Microelectronics , Lattice mismatch , Strained layer
  • Journal title
    Applied Surface Science
  • Serial Year
    2008
  • Journal title
    Applied Surface Science
  • Record number

    1009477