Shave-off vector profiling for TEM samples

This study aims to cross-check the same sample, the same part and the same piece by shave-off profiling and scanning transmission electron microscope (STEM) imaging. For cross-check analysis, a piece was picked up from a failed IC package which might cause electrochemical migration. Critical disagreement on each result was gradient curve on shave-off depth profiling from anode to cathode. In the same piece, shave-off profiling visualized a faint gradient of migrated ions which could not be observed by STEM imaging.