Title of article :
High throughput diffractive multi-beam femtosecond laser processing using a spatial light modulator
Author/Authors :
Zheng Kuang، نويسنده , , Walter Perrie، نويسنده , , Jonathan Leach، نويسنده , , Martin Sharp، نويسنده , , Stuart P. Edwardson، نويسنده , , Miles Padgett، نويسنده , , Geoff Dearden، نويسنده , , Ken G. Watkins، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2008
Pages :
6
From page :
2284
To page :
2289
Abstract :
High throughput femtosecond laser processing is demonstrated by creating multiple beams using a spatial light modulator (SLM). The diffractive multi-beam patterns are modulated in real time by computer generated holograms (CGHs), which can be calculated by appropriate algorithms. An interactive LabVIEW program is adopted to generate the relevant CGHs. Optical efficiency at this stage is shown to be ∼50% into first order beams and real time processing has been carried out at 50 Hz refresh rate. Results obtained demonstrate high precision surface micro-structuring on silicon and Ti6Al4V with throughput gain >1 order of magnitude.
Keywords :
Computer generated holograms (CGH) , Spatial light modulator (SLM) , Femtosecond laser
Journal title :
Applied Surface Science
Serial Year :
2008
Journal title :
Applied Surface Science
Record number :
1010015
Link To Document :
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