Zinc oxide thin film synthesized by combustion chemical vapor deposition

Zinc oxide (ZnO) thin film was prepared on quartz substrate by combustion chemical vapor deposition. Its surface morphology, crystal structure, chemical stoichiometry and optical properties were investigated using scanning electron microscopy, X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and Raman spectroscopy. Some small hexagonal ZnO sheets were observed on top of the ZnO thin film. XPS data showed that as-prepared ZnO thin film is of high O deficiency. Zinc hydroxide species was detected on the surface due to the reaction of interstitial Zn with H2O in air. XRD and Raman spectroscopic results indicated that the ZnO film is polycrystalline and dominant in a hexagonal wurtzite phase.