Title of article :
Effects of substrate rotation on the microstructure of metal sheet fabricated by electron beam physical vapor deposition
Author/Authors :
Yue Sun، نويسنده , , Xiu Lin، نويسنده , , Xiaodong He، نويسنده , , Jiazhen Zhang، نويسنده , , Mingwei Li، نويسنده , , Guangping Song، نويسنده , , Xinyan Li، نويسنده , , Yijie Zhao، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2009
Pages :
6
From page :
5831
To page :
5836
Abstract :
The effects of substrate rotation speed and rotation mode on the microstructure of large-sized metal sheet fabricated by electron beam physical vapor deposition technique were investigated. Helical and columnar microstructures were found in the deposited sheet. Both types of microstructures exhibit no preferential crystallographic orientation. The column inclination under asymmetric vapor incidence pattern was discussed. Integrated vapor incidence angle was found to be effective in evaluating the column inclination.
Keywords :
Physical vapor deposition (PVD) , Film growth , Helical microstructure
Journal title :
Applied Surface Science
Serial Year :
2009
Journal title :
Applied Surface Science
Record number :
1011384
Link To Document :
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