Study on electron scattering in solid targets using accurate transport cross-sections

The Vicanek and Urbassek theory [M. Vicanek, H.M. Urbassek, Phys. Rev. B 44 (1991) 7234] combined with a Monte Carlo simulation are used to investigate the transport of 0.5–4 keV electrons in solid targets. The cross-sections used to describe the electron transport have been calculated via a new improved version of the approximate analytical expression given by Jablonski [A. Jablonski, Phys. Rev. B 58 (1998) 16470]. Some applications are presented here for the calculation of electron backscattering coefficient in semi-infinite Al and Cu targets. The obtained results accord with success with the experiment and clearly represent an improvement with respect to previous theoretical calculations.