Stoney equation limits for samples deformed as a cylindrical surface

This paper proposes a three-dimensional system for modelling stress in thin films deposited on thick substrates deformed as a small cylindrical surface by means of the minimization of the deformation energy. The results show the validity limits of the well-established Stoney equation and indicate the necessity of a correction term for substrates with Poisson ratio (νs) in the range of 0.25 < νs ≤ 0.4.