Title of article :
Influence of laser power on the orientation and microstructure of CeO2 films deposited on Hastelloy C276 tapes by laser chemical vapor deposition
Author/Authors :
Pei Zhao، نويسنده , , Akihiko Ito، نويسنده , , Yuan-Rong Tu، نويسنده , , Takashi Goto، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2010
Pages :
4
From page :
6395
To page :
6398
Abstract :
CeO2 films were prepared on LaMnO3/MgO/Gd2Zr2O7 multi-coated Hastelloy C276 tapes by laser chemical vapor deposition at different laser power (PL) from 46 to 101 W. Epitaxial (1 0 0) CeO2 films were prepared at PL = 46–93 W (deposition temperature, Tdep = 705–792 K). Epitaxial CeO2 films had rectangular-shaped grains at PL = 46–77 W (Tdep = 705–754 K), while square-shaped grains were obtained at PL = 85–93 W (Tdep = 769–792 K). CeO2 films showed a columnar microstructure. Epitaxial (1 0 0) CeO2 films with rectangular grains exhibited full width at half maximum of ω-scan on (2 0 0) reflection and ϕ-scan on (2 2 0) reflection of 3.4–3.2° and 6.0–7.2°, respectively. The deposition rate of the epitaxial (1 0 0) CeO2 films had a maximum of 4.6 μm h−1 at PL = 77 W (Tdep = 754 K).
Keywords :
Laser chemical vapor deposition , CeO2 , High deposition rate
Journal title :
Applied Surface Science
Serial Year :
2010
Journal title :
Applied Surface Science
Record number :
1013043
Link To Document :
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