• Title of article

    Spectroscopic characterization of β-FeSi2 single crystals and homoepitaxial β-FeSi2 films by XPS and XAS

  • Author/Authors

    F. Esaka، نويسنده , , H. Yamamoto، نويسنده , , H. Udono، نويسنده , , N. Matsubayashi، نويسنده , , Masami K. Yamaguchi، نويسنده , , S. Shamoto، نويسنده , , M. Magara، نويسنده , , T. Kimura، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2011
  • Pages
    5
  • From page
    2950
  • To page
    2954
  • Abstract
    Chemical state analysis by a combination of X-ray photoelectron spectroscopy (XPS) and X-ray absorption spectroscopy (XAS) using synchrotron radiation is performed for β-FeSi2 single crystals and homoepitaxial β-FeSi2 films. The Si 2p XPS and Fe L-edge XAS spectra imply that the annealing at 1173 K to remove native oxide layers on the crystal induces the formation of FeSi in the surface. The formation of FeSi is also confirmed by Si K-edge XAS analysis. For the homoepitaxial β-FeSi2 films grown on the crystals, the Si K-edge XAS spectra indicate that structurally homogeneous β-FeSi2 films can be grown on the β-FeSi2 single crystals when the substrate temperatures of 973 and 1073 K are applied for molecular beam epitaxy (MBE). Consequently, it is indicated that the combination of XPS and XAS using synchrotron radiation is a useful tool to clarify chemical states of β-FeSi2 single crystals and homoepitaxial β-FeSi2 films, which is important to reveal optimized growth conditions of homoepitaxial films.
  • Keywords
    XPS , XAS , Fe L-edge , Si K-edge , Iron silicide , Depth profiling
  • Journal title
    Applied Surface Science
  • Serial Year
    2011
  • Journal title
    Applied Surface Science
  • Record number

    1013756