Optical emission spectroscopy by Ar3+ ion sputtering of Ti surface under O2 environment

Visible light emission from atoms and ions sputtered on a polycrystalline Ti surface was observed under irradiation of 30 keV Ar3+ ions. A number of atomic lines of Ti I and II were observed in the wavelength of 250–850 nm. The intensity of Ti II emission increased 1.3–5.6 times by introducing oxygen molecules at a pressure of 5.8 × 10−5 Pa, whereas that of Ti I decreased 0.5–0.8 times. Factors enhancing or reducing photon intensities were plotted as a function of energy of the corresponding electrons in the excited states for Ti atoms and Ti+ ions.