Ultra-thin Nb2O5 films with excellent uniformity have been grown on Si (1 0 0) by atomic-layer-deposition using Nb(OC2H5)5 and H2O precursors, and the corresponding thermal stability has been studied through atomic force microscope, transmission electron

We report the formation of a planar waveguide in an Nd:YGG laser crystal by low-energy He-ion implantation at liquid nitrogen temperature (77 K). The optical properties are measured by the prism coupling and end-face coupling methods, the absorption properties the waveguide and Nd:YGG substrate are obtained. The fluorescence spectrums are investigated by confocal methods. The experimental results revealed that the planar waveguide preserved the absorption and fluorescence properties of the Nd:YGG laser crystal. Thus, the planar waveguide formed by the ion implantation method is a promising candidate in waveguide lasers.