High energy ion scattering and recoil spectrometry in applied materials science

The fundamentals of high energy ion scattering and recoil spectrometry (possibly combined with channelling) are discussed in relation to the accuracies required for materials science studies and in relation to characteristics of competing surface analysis techniques. The extreme versatility of ion scattering techniques is demonstrated by a survey through many application areas in materials science ranging from plastics to oxidic insulators, semiconductors and metals.