Investigation of the quartz resonator as an industrial cleaning monitor

The evaluation of cleaning processes can be performed in real time using the quartz resonator (QR) cleaning monitor as an in situ probe to monitor surface contamination. Viscous properties of thin films are modeled to determine the QRʹs limitation to film thickness in contact with liquids of varying properties. The demonstrated ability to provide submonolayer mass detection during a cleaning process allows this monitor to be used to probe the kinetics and effectiveness of a cleaning process. This capability can rapidly evaluate the total effectiveness of environmentally friendly alternative cleaning processes needed to replace cleaners such as chlorofluorocarbons (CFCs) and chlorinated hydrocarbons. These monitors could also be used to verify cleaning bath integrity so that bath cleaning solution changes are optimized. This condition would maintain high product quality and yield while minimizing waste from disposal.