A radiofrequency plasma in a polydimethylsiloxane (PDMS) microchip Original Research Article

This is the first report of an analytical plasma in a polymer (polydimethylsiloxane, PDMS) microchip. The plasma channel has dimensions 2 mm diameter × 50 mm long, is operated at atmospheric pressure in Ar, 27.12 MHz and 70 W, and is viewed axially through a purged fiber optic cable. CF4 gas at 0.1% in argon yields mainly C2 emission bands. This PDMS microchip is manufactured easily, inexpensive, and more tolerant to fluorocarbons than microchip plasmas in silica. Based on these initial results, this PDMS microchip plasma could become useful as a sensor for the fluorocarbon gases emitted in semiconductor process or as a gas chromatography (GC) detector for potential application.