Patterning surface oxide nanostructures using atomic force microscope local anodic oxidation

We show how the analysis of the current detected during the fabrication of titanium oxide dots by AFM local anodic oxidation allows the determination of the optimal duration of bias voltage for obtaining nanostructures with higher aspect ratio. Experimental conditions to fabricate oxide dots and lines are discussed. Finally, we demonstrate that proper values of scan rate and period of a pulsed bias voltage enables the selective oxidation of dots and lines.