Investigation of nano-electromechanical-systems using surface acoustic waves

This study presents measurements on nanomechanical resonators implemented on a GaAs substrate. We observed several eigenmodes with eigenfrequencies up to View the MathML source and quality factors of about 200. Using finite element methods we were able to match the resonances to the surface acoustic waves excitation within a few MHz. We report on investigations regarding the coupling of surface acoustic waves to the nanoresonators.