Quantum dot site-selection using in situ prepared nano-templates

InAs/InP self-assembled quantum dots are deposited by chemical beam epitaxy on InP templates generated in situ during the growth process itself. By careful choice of nano-template geometry we produce linear arrays of site-selected, self-assembled quantum dots. The quantum dot density can be varied by nearly two orders of magnitude by choice of the nano-template dimensions. Preliminary optical measurements on these site-selected quantum dot structures are consistent with the evolution of the dot density with template dimension observed by electron microscopy.