Structural and optical properties of high-density (>1011/cm2) InAs QDs with varying Al(Ga)As matrix layer thickness

We have obtained high-density (>1011/cm2) InAs quantum dot (QD) structures by using an Al(Ga)As matrix layer. With increase of the AlAs matrix layer thickness, the density of QDs increases a little and the luminescence intensity emitted from InAs QDs decreases. We have used a thin GaAs insertion layer (IL) for the reason of keeping InAs QDs from an aluminum intermixing towards QDs. As the thickness of GaAs IL increases, the density of QDs decreases slightly due to the reduction of the roughness of an AlAs matrix layer. However, the luminescence intensity increases with increase in the thickness of GaAs IL resulting from the efficient blocking of an aluminum intermixing towards QDs.