Title of article :
A LOW VOLTAGE MEMS STRUCTURE FOR RF CAPACITIVE SWITCHES
Author/Authors :
By S. Afrang and E. Abbaspour-Sani ، نويسنده ,
Issue Information :
ماهنامه با شماره پیاپی سال 2006
Abstract :
A novel structure for the capacitive micromachined switches with low actuation voltage is proposed. In this structure both contact plates of the switch are designed as displaceable membranes. Two structures with similar dimensions and conditions, differin
Journal title :
Progress In Electromagnetics Research
Journal title :
Progress In Electromagnetics Research