Title of article
A LOW VOLTAGE MEMS STRUCTURE FOR RF CAPACITIVE SWITCHES
Author/Authors
By S. Afrang and E. Abbaspour-Sani ، نويسنده ,
Issue Information
ماهنامه با شماره پیاپی سال 2006
Pages
11
From page
157
To page
167
Abstract
A novel structure for the capacitive micromachined switches with low actuation voltage is proposed. In this structure both contact plates of the switch are designed as displaceable membranes. Two structures with similar dimensions and conditions, differin
Journal title
Progress In Electromagnetics Research
Serial Year
2006
Journal title
Progress In Electromagnetics Research
Record number
1054276
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