Title of article :
TWO NOVEL STRUCTURES FOR TUNABLE MEMS CAPACITOR WITH RF APPLICATIONS
Author/Authors :
By S. Afrang and E. Abbaspour-Sani ، نويسنده , , N. Nasirzadeh، نويسنده , , and G. R. Dadashzadeh ، نويسنده ,
Issue Information :
ماهنامه با شماره پیاپی سال 2007
Abstract :
Two novel structures for high-Q MEMS tumble capacitors are presented. The proposed designs include full plate as well as the comb structured capacitors. They can be fabricated employing surface micromachining technology which is CMOS-compatible. The struc
Journal title :
Progress In Electromagnetics Research
Journal title :
Progress In Electromagnetics Research
