Title of article
TWO NOVEL STRUCTURES FOR TUNABLE MEMS CAPACITOR WITH RF APPLICATIONS
Author/Authors
By S. Afrang and E. Abbaspour-Sani ، نويسنده , , N. Nasirzadeh، نويسنده , , and G. R. Dadashzadeh ، نويسنده ,
Issue Information
ماهنامه با شماره پیاپی سال 2007
Pages
15
From page
169
To page
183
Abstract
Two novel structures for high-Q MEMS tumble capacitors are presented. The proposed designs include full plate as well as the comb structured capacitors. They can be fabricated employing surface micromachining technology which is CMOS-compatible. The struc
Journal title
Progress In Electromagnetics Research
Serial Year
2007
Journal title
Progress In Electromagnetics Research
Record number
1054336
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