Effect of Sb doping on properties of conductive spray deposited SnO2 thin films

Antimony doped SnO2 films have been prepared by spray pyrolysis. The films deposited at an optimised substrate temperature of 520°C were found to have a resistivity as low as 0.4×10−4 Ω cm. Doping concentration of Sb in the spraying solution was varied from 0.5 to 5%, keeping the spray rate constant. The sheet resistance was as low as 6 Ω cm−2. About 80% average transmission in the visible region was obtained for 1% Sb doped films. The refractive index increased from 1.62 to 2.64 with increasing the Sb content from 0 to 5%. Van-der-Pauw’s four probe technique of conductivity measurement was used to measure electrical conductivity (σ), Hall coefficient (RH), carrier concentration (n) and Hall mobility (μH) of the Sb:SnO2 films. The films deposited using 1% Sb doping showed the best properties.