Title of article :
Electron-emitter fabricated at low temperature by diamond-nano-seeding technique
Author/Authors :
Akio Hiraki، نويسنده ,
Issue Information :
دوهفته نامه با شماره پیاپی سال 2001
Abstract :
Fabrication of diamond (including diamond like carbon: DLC) films as electronic materials, for example, to be used as electron-emitter, requires several following conditions. They are: (1) low-temperature fabrication (or deposition on several substrates and sometimes ones with low melting point, like glasses) below 400°C; (2) wide area film deposition onto wide substrates of several square inches, like Si wafer and glass substrate; (3) reproducible deposition of well-defined film quality and (4) others.
Keywords :
Electric property , Plasma-assisted CVD , Thin films , Raman spectroscopy and scattering
Journal title :
Materials Chemistry and Physics
Journal title :
Materials Chemistry and Physics