The magnetic properties of sputter-deposited and annealed CoCr/CoCrPt recording media

CoCr and CoCrPt thin films on Cr or CrTi underlayers were studied to improve the magnetic properties for permanent magnetic stabilization layer application in anistropic magnetoresistance/giant magnetoresistance devices. Their structural and magnetic properties were investigated as a function of Pt content in magnetic layer, Ar gas pressure, Cr underlayer thickness or Ti content of CrTi underlayer and post-deposited annealed temperature. High coercivity Hc values (2000 Oe) can be achieved even remanence-thickness product (Mrδ) less than 1 memu/cm2 during room temperature deposited using proper magnetic alloy and deposition processes. Post-deposited annealed further improved the coercivity of the cobalt films up to 3500 Oe as Mrδ was reduced from 1.2 to 0.5 memu/cm2.