• Title of article

    Micromachined coplanar waveguide on GaAs for optoelectronic IC applications

  • Author/Authors

    K.، Onodera, نويسنده , , M.، Tokumitsu, نويسنده , , T.، Akeyoshi, نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2004
  • Pages
    -67
  • From page
    68
  • To page
    0
  • Abstract
    The fabrication and the millimetre-wave characteristics of a novel micromachined waveguide, called a grooved conductorbacked coplanar waveguide, are presented. The waveguide has good compatibility with optical waveguides. By adopting a microshielded structure, unwanted substrate modes and resonances can be suppressed at frequencies up to 110 GHz.
  • Keywords
    Hydrograph
  • Journal title
    IEE Electronics Letters
  • Serial Year
    2004
  • Journal title
    IEE Electronics Letters
  • Record number

    106994