Title of article
Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator
Author/Authors
A.، Wong-Foy, نويسنده , , M.E.، Simon, نويسنده , , H.B.، Chan, نويسنده , , H.R.، Stuart, نويسنده , , D.، Greywall, نويسنده , , D.T.، Fuchs, نويسنده , , F.، Baumann, نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
-141
From page
142
To page
0
Abstract
A demonstration of how to monolithically combine silicon waveguides with MEMS-based phase shifters in a single SOI chip is presented. A folded Mach-Zehnder interferometer switch has been designed and tested. The phase shifters have negligible power consumption and a switching time of 150 (mu)s.
Keywords
Hydrograph
Journal title
IEE Electronics Letters
Serial Year
2004
Journal title
IEE Electronics Letters
Record number
107042
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