• Title of article

    Monolithic integration of MEMS-based phase shifters and optical waveguides in silicon-on-insulator

  • Author/Authors

    A.، Wong-Foy, نويسنده , , M.E.، Simon, نويسنده , , H.B.، Chan, نويسنده , , H.R.، Stuart, نويسنده , , D.، Greywall, نويسنده , , D.T.، Fuchs, نويسنده , , F.، Baumann, نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2004
  • Pages
    -141
  • From page
    142
  • To page
    0
  • Abstract
    A demonstration of how to monolithically combine silicon waveguides with MEMS-based phase shifters in a single SOI chip is presented. A folded Mach-Zehnder interferometer switch has been designed and tested. The phase shifters have negligible power consumption and a switching time of 150 (mu)s.
  • Keywords
    Hydrograph
  • Journal title
    IEE Electronics Letters
  • Serial Year
    2004
  • Journal title
    IEE Electronics Letters
  • Record number

    107042