Super-high-(delta) athermal arrayed waveguide grating with resin-filled trenches in slab region

A small and low-loss athermal AWG is demonstrated based on super-high-(delta) waveguides. Resin-filled trenches are formed in the slab region to compensate for the temperature-dependent wavelength shift. Small wavelength shift of 0.03 nm is achieved for the temperature range 0-65(degree)C with almost no spectral degradation.