Title of article
Low-loss InGaAsP/InP submicron optical waveguides fabricated by ICP etching
Author/Authors
J.-P.، Vilcot, نويسنده , , D.، Decoster, نويسنده , , S.، Dupont, نويسنده , , A.، Beaurain, نويسنده , , P.، Miska, نويسنده , , M.، Zegaoui, نويسنده , , H.W.، Li, نويسنده , , M.، Constant, نويسنده , , J.، Chazelas, نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2004
Pages
-864
From page
865
To page
0
Abstract
The fabrication and characterisation of low-loss InGaAsP/InP optical submicron waveguides made with ICP etching is reported. Their width ranges from 0.2 to 2 (mu)m. For the 0.5 (mu)m width, the propagation losses at (lambda)=1.55 (mu)m as low as 4.2 dB/mm have been measured.
Keywords
Hydrograph
Journal title
IEE Electronics Letters
Serial Year
2004
Journal title
IEE Electronics Letters
Record number
107515
Link To Document