Title of article
IR laser induced chemical vapour deposition of carbonaceous phases from 3-butyn-2-one Original Research Article
Author/Authors
V. D??nek، نويسنده , , M. Urbanov?، نويسنده , , Z. Bastl، نويسنده , , I. Gregora، نويسنده , , V. Vorl??ek، نويسنده , , J. ?ubrt، نويسنده , , J. Pola، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1998
Pages
4
From page
521
To page
524
Abstract
CO2 laser induced decomposition of 3-butyn-2-one in the gas phase results in the deposition of carbonaceous films composed of a graphitic and monohydrogenated carbon, in which H is dominantly bonded to sp3 sites. The films incorporate oxygen in superficial layers. The technique is suitable for preparation of thin C-based films at low substrate temperatures.
Keywords
A. Pyrolytic carbon , B. chemical vapour deposition , D. chemical structure , C. ESCA
Journal title
Carbon
Serial Year
1998
Journal title
Carbon
Record number
1117574
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