Author/Authors :
V. D??nek، نويسنده , , M. Urbanov?، نويسنده , , Z. Bastl، نويسنده , , I. Gregora، نويسنده , , V. Vorl??ek، نويسنده , , J. ?ubrt، نويسنده , , J. Pola، نويسنده ,
Abstract :
CO2 laser induced decomposition of 3-butyn-2-one in the gas phase results in the deposition of carbonaceous films composed of a graphitic and monohydrogenated carbon, in which H is dominantly bonded to sp3 sites. The films incorporate oxygen in superficial layers. The technique is suitable for preparation of thin C-based films at low substrate temperatures.
Keywords :
A. Pyrolytic carbon , B. chemical vapour deposition , D. chemical structure , C. ESCA
