Synthesis of well crystallized boron-carbon filament by chemical vapor deposition using a nickel catalyst Original Research Article

Thin filamentous boron-substituted carbon, BCx, has been synthesized by chemical vapor deposition using a nickel catalyst at 800 °–1100 °C from benzene, boron trichloride and hydrogen. The CB ratios of the deposited products increased from 4 to 58 with increase in the deposition temperature from 800 ° to 1100 °C. BCx. samples also contained oxygen and hydrogen, the amount of which decreased with increasing deposition temperature and increased with increasing duration of the deposition. The crystallinity of BCx samples was significantly improved by the use of a nickel catalyst. The d(002) values were in the range of 0.336–0.338 nm smaller than 0.342 nm for a product prepared without catalyst, increasing with increasing duration of the reaction. XPS data suggest the existence of BBC2, BC3 and BO bondings in BCx.