Title of article
O2 plasma etching of diamond-like carbon thin films prepared by an r. f. Plasma pulsed deposition method
Author/Authors
H. Yamada، نويسنده , , O. Tsuji، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 1998
Pages
1
From page
1247
To page
1247
Journal title
Carbon
Serial Year
1998
Journal title
Carbon
Record number
1117697
Link To Document