In-situ analysis of gas phase decomposition and kinetic study during carbon deposition from mixtures of carbon tetrachloride and methane Original Research Article

Gas phase analyses and kinetic studies were carried out in-situ during the CVD of pyrocarbon from a methane/carbon tetrachloride mixture at low pressure (2 kPa) and constant flow rate (50 sccm). At low temperatures (<800°C), it is assumed that pyrocarbon is formed from chlorinated intermediate species with an apparent activation energy of 180 kJ/mol. At higher temperatures, the apparent activation energy is 140 kJ/mol and unsaturated hydrocarbons are the most probable carbon precursors.