Title of article :
Experimental comparison of N(1s) X-ray photoelectron spectroscopy binding energies of hard and elastic amorphous carbon nitride films with reference organic compounds Original Research Article
Author/Authors :
In this work، نويسنده , , hard and elastic amorphous carbon nitride (a-CNx) films were deposited by DC magnetron sputtering on heated Si(001) substrates at 400 °C. Nanoindentation results confirmed that the films were highly compliant and had high elastic recovery. X، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Keywords :
D. chemical structure , mechanical properties , A. Carbon films , C. x-ray photoelectron spectroscopy , B. plasma sputtering
