Title of article :
Identification of carbon phases and analysis of diamond/substrate interfaces by Raman spectroscopy Original Research Article
Author/Authors :
A. Kromka، نويسنده , , J. Breza، نويسنده , , M. Kadle???kov?، نويسنده , , J. Jan??k، نويسنده , , F. Balon، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2005
Abstract :
Raman spectroscopy is employed to characterize thin diamond and diamond-like carbon films deposited by hot filament chemical vapour deposition (HFCVD). A method is proposed and experimentally verified for a contact-less measurement of the actual substrate temperature by Raman spectroscopy.
Keywords :
A. Diamond , diamond-like carbon , B. chemical vapour deposition , C. Raman spectroscopy
