Title of article

Electrostatic chuck as application of B/C/N ceramics

Author/Authors

Kiyotoshi Fujii، نويسنده ,

Issue Information

روزنامه با شماره پیاپی سال 2007

Pages

1

From page

1375

To page

1375

Journal title

Carbon

Serial Year

2007

Journal title

Carbon

Record number

1122104