Title of article
Dependence of pyrocarbon microstructure on the substrate and annealing during the initial stage of chemical vapor deposition Original Research Article
Author/Authors
V. De Pauw، نويسنده , , J. Hawecker، نويسنده , , R. Schneider، نويسنده , , W. Send، نويسنده , , X.L. Wang، نويسنده , , D. Gerthsen، نويسنده ,
Issue Information
روزنامه با شماره پیاپی سال 2008
Pages
9
From page
236
To page
244
Abstract
Electron microscopic and electron spectroscopic techniques were applied to study interface properties, microstructure and texture of pyrolytic carbon obtained after short-time chemical vapor deposition (CVD) on planar Si substrates. The pyrolytic carbon w
Journal title
Carbon
Serial Year
2008
Journal title
Carbon
Record number
1125516
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