Title of article :
Three-dimensional microstructuring of carbon by thermoplastic spacer evaporation during pyrolysis Original Research Article
Author/Authors :
Yasuhiro Yamada، نويسنده , , D.D.L. Chung، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2008
Abstract :
The three-dimensional microstructuring of carbon is useful for microelectromechanical devices and electrode arrays. A microstructure in the form of a microscale bridge (consisting of a girder and two adherent substructures) on an alumina substrate with a
