The probability scheme of constructing the mathematical model of shadowed sputtering Original Research Article

The probability scheme of examination of the shadowed vacuum sputtering process is suggested. If one restricts the consideration by non-scattering part of the scheme the resulting model would be equivalent to geometro-optical shadowing model used by our predecessors. At the same time the scheme gives the possibility for the model improvement. Instead of complicating the model by using the multi-particle scattering it is possible to include all the deviations from geometro-optical model into the distribution function of sputtered particle.