Three-dimensional magnetic field analyses on the magnetron sputtering system by using Free Mesh Method Original Research Article

A code using the 3-dimensional Finite Element Method (FEM) and Free Mesh Method (FMM) has been developed and applied to the magnetic field analyses in the plasma devices, where a ferromagnetic material is used as a target. An adaptive method is applied to the re-distribution of the nodes. It is shown that this method is useful in the magnetic field analyses.