A feed-back control approach for global simulation of high density plasma discharges Original Research Article

Spatially averaged global simulations have been widely used to study discharge characteristics of high density plasma discharge, because the global insight on the dependence of quantities such as densities and temperatures can be obtained. Above all, the global model can quickly predict the plasma parameters on the external or the chamber parameters comparing with multi-dimensional modeling. However, the global model can be expensive to compute the plasma parameters for complex or mixed gas discharges. Therefore, in this work, we applied a feed-back approach to solve a set of spatially averaged fluid equations for charged particles, neutrals, and radicals. The results were shown that the developed model could efficiently enhance convergence of simulations.