Title of article :
Particle-in-Cell/Monte Carlo simulation of CF4 discharge in capacitively coupled plasma reactor Original Research Article
Author/Authors :
Jonghyuk Kang، نويسنده , , Ganyoung Park، نويسنده , , Jaekoo Lee، نويسنده ,
Issue Information :
دوهفته نامه با شماره پیاپی سال 2007
Pages :
2
From page :
129
To page :
130
Journal title :
Computer Physics Communications
Serial Year :
2007
Journal title :
Computer Physics Communications
Record number :
1137253
Link To Document :
https://search.isc.ac/dl/search/defaultta.aspx?DTC=10&DC=1137253
