In situ TEM straining of single crystal Au films on polyimide: Change of deformation mechanisms at the nanoscale Original Research Article

In situ transmission electron microscopy straining experiments were performed on 40, 60, 80 and 160 nm thick single crystalline Au films on polyimide substrates. A transition in deformation mechanisms was observed with decreasing film thickness: the 160 nm thick film deforms predominantly by perfect dislocations while thinner films deform mainly by partial dislocations separated by stacking faults. In contrast to the 160 nm thick film, interfacial dislocation segments are rarely laid down by threading dislocations for the thinner films. At the late stages of deformation in the thicker Au films prior to fracture, dislocations start to glide on the (0 0 1) planes (cube-glide) near the interface with the polymer substrate. The impact of size-dependent dislocation mechanisms on thin film plasticity is addressed.