Title of article :
Applications of shear horizontal surface acoustic waves to thin film evaluation
Author/Authors :
M. Baszun، نويسنده , , D. Grze?da، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2003
Abstract :
Shear horizontal acoustic wave devices could be used as sensing elements for the measurement of material film properties. This work concerns gravimetric and viscosity sensors for which computer simulation results are given.
Keywords :
Surface acoustic wave , Viscosity sensors , SSBW
Journal title :
Journal of Materials Processing Technology
Journal title :
Journal of Materials Processing Technology
