Fabrication of dies in micro-scale for micro-sheet metal forming

A surface treatment process for micro-dies was investigated in this study. A high-energy ion beam irradiation for finishing die-surfaces with features of sub-millimeter size and a diamond-like carbon (DLC) coating process on the surface of the die for improving the wear-resistance were developed. The influences of DLC coating process conditions and surface condition of the substrate (die) on the feature of DLC film were investigated. A nano-indentation test was introduced to measure mechanical properties of the DLC coating and to evaluate adhesion strength between the DLC coating and the substrate. Furthermore, a micro-bending test was carried out for evaluation of wear-resistance of the DLC coating.