• Title of article

    Performance of single crystal diamond tools in ductile mode cutting of silicon

  • Author/Authors

    M. Sharif Uddin، نويسنده , , K.H.W. Seah، نويسنده , , M. Rahman، نويسنده , , X.P. Li، نويسنده , , K. Liu، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2007
  • Pages
    7
  • From page
    24
  • To page
    30
  • Abstract
    In this study, ductile mode cutting of silicon wafer materials has been carried out using an ultra-precision lathe with single crystal diamond cutters and the wear characteristics of the tool and the effect of its different diamond crystal orientations were investigated. Experimental results indicated that wear occurred mainly on the flank face of the tool and the wear pattern was typically mechanical abrasive wear, adhesive wear and possible thermo-chemical wear. At higher cutting distance, crater wear with small grooves in the vicinity of cutting edge was observed on the tool rake face. However, given the highly anisotropic nature in properties of diamond, wear resistance of a diamond tool varies with the crystal planes as well as crystal directions on the same plane. From this study, it is found that in terms of tool flank wear (VBmax) resistance, the tool life of the diamond cutter with crystal orientations {1 0 0} as the rake and {1 1 0} as the flank planes, was much longer than those of the diamond cutters with other crystal orientations as the rake and flank planes.
  • Keywords
    Single crystal diamond , tool wear , Crystal orientation , Ductile mode cutting , Silicon
  • Journal title
    Journal of Materials Processing Technology
  • Serial Year
    2007
  • Journal title
    Journal of Materials Processing Technology
  • Record number

    1180750