Title of article :
A study on optical device alignment system using ultra precision multi-axis stage
Author/Authors :
S.H. Jeong، نويسنده , , G.H. Kim، نويسنده , , K.R. Cha، نويسنده ,
Issue Information :
روزنامه با شماره پیاپی سال 2007
Abstract :
Optical fiber communication has expanded communication networks with its high transmission rate and quality. The alignment and the attachment technology are very important in the fabrication of an optical device. But, the alignment of an optical device is time consuming. In this paper, the driving mechanism of the ultra precision stage is studied for application in optical device alignment. The travel and the resolution of the stage are investigated. The alignment algorithms applied to the ultra precision multi-axis stage are the field search algorithm and peak search algorithm.
Keywords :
Optical device alignment , Flexure , Capacitance gauge , Field search , Peak search , PZT actuator
Journal title :
Journal of Materials Processing Technology
Journal title :
Journal of Materials Processing Technology