• Title of article

    The effect of anisotropy on the deformation and fracture of sapphire wafers subjected to thermal shocks

  • Author/Authors

    T. Vodenitcharova، نويسنده , , L.C. Zhang، نويسنده , , I. Zarudi، نويسنده , , Y. Yin، نويسنده , , H. Domyo، نويسنده , , T. Ho، نويسنده , , M. Sato، نويسنده ,

  • Issue Information
    روزنامه با شماره پیاپی سال 2007
  • Pages
    11
  • From page
    52
  • To page
    62
  • Abstract
    This paper studies the effect of anisotropy on the response of an R-plane sapphire wafer to a rapid thermal loading. The finite element method was used to analyse the temperature and stress distribution in the wafer when the environment was heated from room temperature to 800 °C, and then cooled down to room temperature. To determine the weak and strong points along the wafer edge, fracture criteria for anisotropic materials were applied. It was found that the maximum tensile stresses occur at the flat wafer edge on cooling down, and could fracture the wafer, most likely at a location of a high tensile stress and in a direction of a weak cleavage plane. The wafer appears to be most prone to fracture at its flat edge, and would crack in the weakest plane image. The strongest points along the edge are located at the sides of the flat edge, where the tensile stresses in the wafer plane are the lowest. A circular wafer subjected to the same thermal loading was also analysed for comparison, and the weakest and strongest locations and cleavage planes were determined.
  • Keywords
    Sapphire wafers , Thermal shock , Thermal stresses , anisotropy
  • Journal title
    Journal of Materials Processing Technology
  • Serial Year
    2007
  • Journal title
    Journal of Materials Processing Technology
  • Record number

    1181323