Processing of PZT actuator and nickel plate in a multi-droplets microejector

The fabrication processes of components for a liquid microejector are described in the paper. The components of the microejector, the vibration plate and the nozzle nickel-made plate, were produced by multilevel electroforming of UV-LIGA technology. A shear-mode PZT actuator, manufactured by powder metallurgy, was devised to drive the microejector for generating tiny liquid droplets. This plate-shaped actuator poled with remnant polarization perpendicular to the actuating field induced a piezoelectric shear effect. The polarizing procedure of the PZT actuator was illustrated in detail. The components were bonded together by thermosetting adhesive. The temperature effect on the PZT actuating performance was further investigated since the bonding temperature can substantially affect the electromechanical properties of the PZT actuator. An appropriate bonding temperature for PZT actuator was suggested.